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Atomic layer deposition of ZnO thin films on boron-doped nanocrystalline diamond

dc.contributor.authorHikavyy, Andriy
dc.contributor.authorClauws, P.
dc.contributor.authorVanbesien, K.
dc.contributor.authorDe Visschere, P.
dc.contributor.authorWilliams, Oliver
dc.contributor.authorDaenen, M.
dc.contributor.authorHaenen, Ken
dc.contributor.authorButler, J.E.
dc.contributor.authorFeygelson, T.
dc.date.accessioned2021-10-16T16:40:43Z
dc.date.available2021-10-16T16:40:43Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12298
dc.sourceIIOimport
dc.titleAtomic layer deposition of ZnO thin films on boron-doped nanocrystalline diamond
dc.typeJournal article
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.beginpage983
dc.source.endpage986
dc.source.journalDiamond and Related Materials
dc.source.issue4_7
dc.source.volume16
imec.availabilityPublished - imec


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