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An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices

dc.contributor.authorHong, Eun Kee
dc.contributor.authorDemuynck, Steven
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMeynen, Herman
dc.date.accessioned2021-10-16T16:42:11Z
dc.date.available2021-10-16T16:42:11Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12304
dc.sourceIIOimport
dc.titleAn investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices
dc.typeJournal article
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2582
dc.source.endpage2586
dc.source.journalMicroelectronic Engineering
dc.source.issue11
dc.source.volume84
imec.availabilityPublished - open access
imec.internalnotesMAM Workshop 2007


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