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Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure

dc.contributor.authorIacopi, Francesca
dc.contributor.authorBeyer, Gerald
dc.contributor.authorTravaly, Youssef
dc.contributor.authorWaldfried, Carlo
dc.contributor.authorGage, David M.
dc.contributor.authorDauskardt, Reinhold
dc.contributor.authorHouthoofd, Kristof
dc.contributor.authorJacobs, Pierre
dc.contributor.authorAdriaensens, Peter
dc.contributor.authorSchulze, Knut
dc.contributor.authorSchulz, Stefan
dc.contributor.authorList, Scott
dc.contributor.authorCarlotti, Giovanni
dc.date.accessioned2021-10-16T16:47:46Z
dc.date.available2021-10-16T16:47:46Z
dc.date.issued2007-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12326
dc.sourceIIOimport
dc.titleThermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cure
dc.typeJournal article
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorAdriaensens, Peter
dc.source.peerreviewno
dc.source.beginpage1407
dc.source.endpage1414
dc.source.journalActa Materialia
dc.source.issue4
dc.source.volume55
imec.availabilityPublished - imec


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