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Influence of oxygen desorption on in-situ analysis of the surface composition during O2+ bombardment of Si

dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T16:55:54Z
dc.date.available2021-10-16T16:55:54Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12358
dc.sourceIIOimport
dc.titleInfluence of oxygen desorption on in-situ analysis of the surface composition during O2+ bombardment of Si
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage763
dc.source.endpage771
dc.source.journalSurface Science
dc.source.issue3
dc.source.volume601
imec.availabilityPublished - imec


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