Show simple item record

Stress release structures for actuator beams with a stress gradient

dc.contributor.authorKlaasse, Gerard
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T17:09:19Z
dc.date.available2021-10-16T17:09:19Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12408
dc.sourceIIOimport
dc.titleStress release structures for actuator beams with a stress gradient
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2093
dc.source.endpage2101
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue10
dc.source.volume17
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
16033.pdf
Size:
348.5Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record