dc.contributor.author | Li, Yunlong | |
dc.date.accessioned | 2021-10-16T17:27:32Z | |
dc.date.available | 2021-10-16T17:27:32Z | |
dc.date.issued | 2007-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12476 | |
dc.source | IIOimport | |
dc.title | Low-k dielectric reliability in copper interconnects | |
dc.type | PHD thesis | |
dc.contributor.imecauthor | Li, Yunlong | |
dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Maex, Karen | |
dc.contributor.thesisadvisor | Groeseneken, Guido | |
dc.identifier.url | http://hdl.handle.net/1979/971 | |
imec.availability | Published - imec | |