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Critical-dimension metrology for integrated circuit technology

dc.contributor.authorMarchman, Herschel
dc.contributor.authorLorusso, Gian
dc.contributor.authorAdel, Mike
dc.contributor.authorYedur, Sanjay
dc.date.accessioned2021-10-16T17:50:01Z
dc.date.available2021-10-16T17:50:01Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12553
dc.sourceIIOimport
dc.titleCritical-dimension metrology for integrated circuit technology
dc.typeBook chapter
dc.contributor.imecauthorLorusso, Gian
dc.source.peerreviewno
dc.source.beginpage701
dc.source.bookMircolithography Science and Technology
dc.source.endpage798
imec.availabilityPublished - imec
imec.internalnotes2nd Edition


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