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Independent double-gate FinFets with asymmetric gate stacks

dc.contributor.authorMasahara, Meishoku
dc.contributor.authorSurdeanu, Radu
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorDoornbos, Gerben
dc.contributor.authorNguyen Hoang, Viet
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVrancken, Christa
dc.contributor.authorDevriendt, Katia
dc.contributor.authorNeuilly, Francois
dc.contributor.authorKunnen, Eddy
dc.contributor.authorSuzuki, E.
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T17:53:04Z
dc.date.available2021-10-16T17:53:04Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12563
dc.sourceIIOimport
dc.titleIndependent double-gate FinFets with asymmetric gate stacks
dc.typeJournal article
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorDoornbos, Gerben
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.source.peerreviewno
dc.source.beginpage2097
dc.source.endpage2100
dc.source.journalMicroelectronic Engineering
dc.source.issue9_10
dc.source.volume84
imec.availabilityPublished - imec


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