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Multifunctional nanomechanical systems via tunably coupled piezoelectric actuation

dc.contributor.authorMasmanidis, Sotiris
dc.contributor.authorKarabalin, Rassul
dc.contributor.authorDe Vlaminck, Iwijn
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorFreeman, Mark
dc.contributor.authorRoukes, Michael
dc.date.accessioned2021-10-16T17:54:04Z
dc.date.available2021-10-16T17:54:04Z
dc.date.issued2007-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12566
dc.sourceIIOimport
dc.titleMultifunctional nanomechanical systems via tunably coupled piezoelectric actuation
dc.typeJournal article
dc.contributor.imecauthorBorghs, Gustaaf
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage780
dc.source.endpage783
dc.source.journalScience
dc.source.issue5839
dc.source.volume317
imec.availabilityPublished - open access


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