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Germanium deep-submicron p-FET and n-FET devices, fabricated on germanium-on-insulator substrates

dc.contributor.authorMeuris, Marc
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorBonzom, Renaud
dc.contributor.authorCaymax, Matty
dc.contributor.authorHoussa, Michel
dc.contributor.authorKaczer, Ben
dc.contributor.authorLeys, Frederik
dc.contributor.authorMartens, Koen
dc.contributor.authorOpsomer, Karl
dc.contributor.authorPourghaderi, Mohammad Ali
dc.contributor.authorSatta, Alessandra
dc.contributor.authorSimoen, Eddy
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorVan Moorhem, Els
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorLoo, Roger
dc.contributor.authorClarysse, Trudo
dc.contributor.authorConard, Thierry
dc.contributor.authorDelabie, Annelies
dc.contributor.authorHellin, David
dc.contributor.authorJanssens, Tom
dc.contributor.authorOnsia, Bart
dc.contributor.authorSioncke, Sonja
dc.contributor.authorMertens, Paul
dc.contributor.authorSnow, Jim
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorZimmerman, Paul
dc.contributor.authorBrunco, David
dc.contributor.authorRaskin, G.
dc.contributor.authorLetertre, F.
dc.contributor.authorAkatsu, T.
dc.contributor.authorBillon, T.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T17:57:04Z
dc.date.available2021-10-16T17:57:04Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12575
dc.sourceIIOimport
dc.titleGermanium deep-submicron p-FET and n-FET devices, fabricated on germanium-on-insulator substrates
dc.typeBook chapter
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorVan Moorhem, Els
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage333
dc.source.bookAdvanced Gate Stacks for High-Mobility Semiconductors
dc.source.endpage340
imec.availabilityPublished - open access
imec.internalnotesSpringer Series in Advanced Microelectronics; Vol. 27


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