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High-performance deep submicron Ge pMOSFETs with halo implants

dc.contributor.authorNicholas, Gareth
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorBrunco, David
dc.contributor.authorZimmerman, Paul
dc.contributor.authorEneman, Geert
dc.contributor.authorMartens, Koen
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T18:11:03Z
dc.date.available2021-10-16T18:11:03Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12621
dc.sourceIIOimport
dc.titleHigh-performance deep submicron Ge pMOSFETs with halo implants
dc.typeJournal article
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2503
dc.source.endpage2511
dc.source.journalIEEE Trans. Electron Devices
dc.source.issue9
dc.source.volume54
imec.availabilityPublished - open access


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