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Fabrication of photonic components by nanoimprint technology within ePIXnet

dc.contributor.authorPlachetka, U.
dc.contributor.authorKristensen, A.
dc.contributor.authorScheerlinck, Stijn
dc.contributor.authorWhitbread, N.
dc.contributor.authorHuskens, J.
dc.contributor.authorKoo, N.
dc.contributor.authorKurz, H.
dc.date.accessioned2021-10-16T18:41:30Z
dc.date.available2021-10-16T18:41:30Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12716
dc.sourceIIOimport
dc.titleFabrication of photonic components by nanoimprint technology within ePIXnet
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage573
dc.source.endpage574
dc.source.conference33rd International Conference on Micro- and Nano-Engineering - MNE0
dc.source.conferencedate23/09/2007
dc.source.conferencelocationCopenhagen Denmark
imec.availabilityPublished - open access


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