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Analytical model of the DC-actuation of electrostatic MEMS devices with distributed dielectric charging and non-planar electrodes

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T19:13:03Z
dc.date.available2021-10-16T19:13:03Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12811
dc.sourceIIOimport
dc.titleAnalytical model of the DC-actuation of electrostatic MEMS devices with distributed dielectric charging and non-planar electrodes
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1243
dc.source.endpage1253
dc.source.journalJournal of Microelectromechanical Systems
dc.source.issue5
dc.source.volume16
imec.availabilityPublished - open access


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