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Occurrence of transient enhanced diffusion of B in Ge

dc.contributor.authorSatta, Alessandra
dc.contributor.authorVan Daele, Benny
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T19:24:13Z
dc.date.available2021-10-16T19:24:13Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12843
dc.sourceIIOimport
dc.titleOccurrence of transient enhanced diffusion of B in Ge
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceGADEST Conference: Gettering and Defect Engineering in Semiconductor Technology
dc.source.conferencedate14/10/2007
dc.source.conferencelocationErice Italy
imec.availabilityPublished - imec


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