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Optimal conditions for micromachining Si1-xGex at 210C

dc.contributor.authorSedky, Sherif
dc.contributor.authorBayoumy, Ahmed
dc.contributor.authorAlaa, Ahmed
dc.contributor.authorNagy, Ahmed
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-16T19:33:39Z
dc.date.available2021-10-16T19:33:39Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12871
dc.sourceIIOimport
dc.titleOptimal conditions for micromachining Si1-xGex at 210C
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage581
dc.source.endpage588
dc.source.journalJournal of Microelectromechanical Systems
dc.source.issue3
dc.source.volume16
imec.availabilityPublished - open access


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