dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Eslava Fernandez, Salvador | |
dc.contributor.author | Demand, Marc | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Beckx, Stephan | |
dc.contributor.author | Boullart, Werner | |
dc.date.accessioned | 2021-10-16T19:38:17Z | |
dc.date.available | 2021-10-16T19:38:17Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12884 | |
dc.source | IIOimport | |
dc.title | Profile control of novel non-Si gates using BCl3/N2 plasma | |
dc.type | Journal article | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Demand, Marc | |
dc.contributor.imecauthor | Beckx, Stephan | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.source.peerreview | no | |
dc.source.beginpage | 739 | |
dc.source.endpage | 744 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 3 | |
dc.source.volume | 25 | |
imec.availability | Published - imec | |