IMEC plans ultra-cleanroom manufacturing development effort
| dc.contributor.author | Declerck, Gilbert | |
| dc.date.accessioned | 2021-09-29T12:40:48Z | |
| dc.date.available | 2021-09-29T12:40:48Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/128 | |
| dc.source | IIOimport | |
| dc.title | IMEC plans ultra-cleanroom manufacturing development effort | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Declerck, Gilbert | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 42 | |
| dc.source.endpage | 45 | |
| dc.source.journal | Solid State Technology | |
| dc.source.volume | 37 | |
| imec.availability | Published - open access |