Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications
dc.contributor.author | Thomas, Reji | |
dc.contributor.author | Ehrhart, Peter | |
dc.contributor.author | Roeckerath, Martin | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Rije, Eduard | |
dc.contributor.author | Luysberg, Martina | |
dc.contributor.author | Boese, Markus | |
dc.contributor.author | Schubert, Jürgen | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Waser, Rainer | |
dc.date.accessioned | 2021-10-16T20:07:52Z | |
dc.date.available | 2021-10-16T20:07:52Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12968 | |
dc.source | IIOimport | |
dc.title | Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | G147 | |
dc.source.endpage | G154 | |
dc.source.journal | Journal of the Electrochemical Society | |
dc.source.issue | 7 | |
dc.source.volume | 154 | |
imec.availability | Published - open access |