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Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications

dc.contributor.authorThomas, Reji
dc.contributor.authorEhrhart, Peter
dc.contributor.authorRoeckerath, Martin
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorRije, Eduard
dc.contributor.authorLuysberg, Martina
dc.contributor.authorBoese, Markus
dc.contributor.authorSchubert, Jürgen
dc.contributor.authorCaymax, Matty
dc.contributor.authorWaser, Rainer
dc.date.accessioned2021-10-16T20:07:52Z
dc.date.available2021-10-16T20:07:52Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12968
dc.sourceIIOimport
dc.titleLiquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications
dc.typeJournal article
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageG147
dc.source.endpageG154
dc.source.journalJournal of the Electrochemical Society
dc.source.issue7
dc.source.volume154
imec.availabilityPublished - open access


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