Show simple item record

Plasma induced low-k modification and its impact on reliability

dc.contributor.authorTokei, Zsolt
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCiofi, Ivan
dc.contributor.authorLi, Yunlong
dc.contributor.authorUrbanowicz, Adam
dc.date.accessioned2021-10-16T20:11:22Z
dc.date.available2021-10-16T20:11:22Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12978
dc.sourceIIOimport
dc.titlePlasma induced low-k modification and its impact on reliability
dc.typeJournal article
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorLi, Yunlong
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.source.peerreviewno
dc.source.beginpage110
dc.source.endpage115
dc.source.journalSemiconductor Fabtech
dc.source.issue03_03
dc.source.volumeFT35
imec.availabilityPublished - imec
imec.internalnoteswww.fabtech.org


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record