Impact of Ni-silicide grain orientation on the strain and stress fields induced in patterned silicon
dc.contributor.author | Torregiani, Cristina | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Benedetti, Alessandro | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Van Houtte, P. | |
dc.contributor.author | Pawlak, Bartek | |
dc.contributor.author | Kittl, Jorge | |
dc.date.accessioned | 2021-10-16T20:13:12Z | |
dc.date.available | 2021-10-16T20:13:12Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12983 | |
dc.source | IIOimport | |
dc.title | Impact of Ni-silicide grain orientation on the strain and stress fields induced in patterned silicon | |
dc.type | Journal article | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Pawlak, Bartek | |
dc.source.peerreview | no | |
dc.source.beginpage | 54101 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 5 | |
dc.source.volume | 90 | |
imec.availability | Published - imec |
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