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Observation of stacking faults and prismatic punching systems in silicon by light scattering tomography

dc.contributor.authorKissinger, G.
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorClaeys, Cor
dc.contributor.authorRichter, H.
dc.date.accessioned2021-09-29T14:39:14Z
dc.date.available2021-09-29T14:39:14Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1299
dc.sourceIIOimport
dc.titleObservation of stacking faults and prismatic punching systems in silicon by light scattering tomography
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage191
dc.source.endpage196
dc.source.journalJournal of Crystal Growth
dc.source.volume158
imec.availabilityPublished - open access


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