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Failure mechanisms in MEMS/NEMS devices

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorModlinski, Robert
dc.contributor.authorPuers, Robert
dc.contributor.authorJourdain, Anne
dc.date.accessioned2021-10-16T20:55:11Z
dc.date.available2021-10-16T20:55:11Z
dc.date.issued2007-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13098
dc.sourceIIOimport
dc.titleFailure mechanisms in MEMS/NEMS devices
dc.typeBook chapter
dc.contributor.imecauthorJourdain, Anne
dc.source.peerreviewno
dc.source.beginpage1663
dc.source.bookSpringer Handbook of Nanotechnology, 2nd edition
dc.source.endpage1684
imec.availabilityPublished - imec


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