Show simple item record

Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability

dc.contributor.authorVermont, P.G.
dc.contributor.authorPages, X.
dc.contributor.authorGranneman, E.H.A.
dc.contributor.authorVanormelingen, Koen
dc.contributor.authorVerheyden, K.
dc.contributor.authorMertens, Sofie
dc.date.accessioned2021-10-16T21:27:06Z
dc.date.available2021-10-16T21:27:06Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13183
dc.sourceIIOimport
dc.titleManufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability
dc.typeJournal article
dc.contributor.imecauthorMertens, Sofie
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2572
dc.source.endpage2574
dc.source.journalMicroelectronic Engineering
dc.source.issue11
dc.source.volume84
imec.availabilityPublished - open access
imec.internalnotesMAM Workshop


Files in this item

Thumbnail
Name:
16176.pdf
Size:
228.2Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record