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Nanocrystalline diamond enhanced thickness shear mode resonator

dc.contributor.authorWilliams, Oliver
dc.contributor.authorMortet, Vincent
dc.contributor.authorDaenen, Michael
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-16T21:44:50Z
dc.date.available2021-10-16T21:44:50Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13228
dc.sourceIIOimport
dc.titleNanocrystalline diamond enhanced thickness shear mode resonator
dc.typeJournal article
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.beginpage63514
dc.source.journalApplied Physics Letters
dc.source.issue6
dc.source.volume90
imec.availabilityPublished - imec


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