dc.contributor.author | Zahid, Mohammed | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Zhang, John | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-16T21:56:47Z | |
dc.date.available | 2021-10-16T21:56:47Z | |
dc.date.issued | 2007-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13256 | |
dc.source | IIOimport | |
dc.title | Impact of process conditions on interface and high-k trap density studied by variable Tcharge-Tdischarge charge pumping (VT2CP) | |
dc.type | Journal article | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.source.peerreview | no | |
dc.source.beginpage | 1951 | |
dc.source.endpage | 1955 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 9_10 | |
dc.source.volume | 84 | |
dc.identifier.url | http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V0W-4NVM053-11&_user=799533&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c | |
imec.availability | Published - imec | |
imec.internalnotes | INFOS | |