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An interconnect for out-of-plane assembled biomedical probe arrays

dc.contributor.authorAarts, Arno
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-17T06:13:11Z
dc.date.available2021-10-17T06:13:11Z
dc.date.issued2008
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13273
dc.sourceIIOimport
dc.titleAn interconnect for out-of-plane assembled biomedical probe arrays
dc.typeJournal article
dc.contributor.imecauthorAarts, Arno
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage64004
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue6
dc.source.volume18
dc.identifier.urlhttp://iopscience.iop.org/0960-1317/18/6/064004/pdf/0960-1317_18_6_064004.pdf
imec.availabilityPublished - open access


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