Show simple item record

Engineering polymer core-silica shell size in the composite abrasives for CMP applications

dc.contributor.authorArmini, Silvia
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-17T06:14:02Z
dc.date.available2021-10-17T06:14:02Z
dc.date.issued2008
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13313
dc.sourceIIOimport
dc.titleEngineering polymer core-silica shell size in the composite abrasives for CMP applications
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpageH280
dc.source.endpageH284
dc.source.journalElectrochemical and Solid-State Letters
dc.source.issue10
dc.source.volume11
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record