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Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP

dc.contributor.authorArmini, Silvia
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-17T06:14:04Z
dc.date.available2021-10-17T06:14:04Z
dc.date.issued2008
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13314
dc.sourceIIOimport
dc.titleComposite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpageH401
dc.source.endpageH406
dc.source.journalJournal of the Electrochemical Society
dc.source.issue6
dc.source.volume155
imec.availabilityPublished - imec


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