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Mixed organic/inorganic abrasive particles during oxide CMP

dc.contributor.authorArmini, Silvia
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-17T06:14:06Z
dc.date.available2021-10-17T06:14:06Z
dc.date.issued2008
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13315
dc.sourceIIOimport
dc.titleMixed organic/inorganic abrasive particles during oxide CMP
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageH197
dc.source.endpageH201
dc.source.journalElectrochemical and Solid-State Letters
dc.source.issue7
dc.source.volume11
imec.availabilityPublished - open access


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