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Overview of wafer contamination and defectivity

dc.contributor.authorBearda, Twan
dc.contributor.authorBeaudoin, Stephen P.
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-17T06:15:54Z
dc.date.available2021-10-17T06:15:54Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13354
dc.sourceIIOimport
dc.titleOverview of wafer contamination and defectivity
dc.typeBook chapter
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewno
dc.source.beginpage93
dc.source.bookHandbook of silicon wafer cleaning technology
dc.source.endpage164
imec.availabilityPublished - imec


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