Show simple item record

Contamination control for the 32nm node

dc.contributor.authorBearda, Twan
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.contributor.authorCatana, Gabriela
dc.contributor.authorHuyghebaert, Cedric
dc.date.accessioned2021-10-17T06:16:00Z
dc.date.available2021-10-17T06:16:00Z
dc.date.issued2008
dc.identifier.issn1355-8633
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13356
dc.sourceIIOimport
dc.titleContamination control for the 32nm node
dc.typeJournal article
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.beginpage79
dc.source.endpage85
dc.source.journalSemiconductor Fabtech
dc.source.issue37
dc.identifier.urlhttp://www.fabtech.org/journal/
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record