Development and testing of a silicon-on-insulator (SOI) technology process
| dc.contributor.author | Maes, Herman | |
| dc.date.accessioned | 2021-09-29T14:44:28Z | |
| dc.date.available | 2021-09-29T14:44:28Z | |
| dc.date.issued | 1996 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1336 | |
| dc.source | IIOimport | |
| dc.title | Development and testing of a silicon-on-insulator (SOI) technology process | |
| dc.type | Book chapter | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 215 | |
| dc.source.book | Space Scientific Research in Belgium. Vol. 4: Space Technology | |
| dc.source.endpage | 216 | |
| imec.availability | Published - open access |