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Closed-loop modeling of silicon nanophotonics: from design to fabrication and back again

dc.contributor.authorBogaerts, Wim
dc.contributor.authorBradt, Paul
dc.contributor.authorVanholme, Lieven
dc.contributor.authorBienstman, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-17T06:19:18Z
dc.date.available2021-10-17T06:19:18Z
dc.date.issued2008
dc.identifier.issn0306-8919
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13404
dc.sourceIIOimport
dc.titleClosed-loop modeling of silicon nanophotonics: from design to fabrication and back again
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage801
dc.source.endpage811
dc.source.journalOptical and Quantum Electronics
dc.source.issue11_12
dc.source.volume40
imec.availabilityPublished - open access


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