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Observation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structures

dc.contributor.authorBrunco, David
dc.contributor.authorOpsomer, Karl
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorVerheyden, Kurt
dc.contributor.authorMeuris, Marc
dc.date.accessioned2021-10-17T06:24:38Z
dc.date.available2021-10-17T06:24:38Z
dc.date.issued2008
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13460
dc.sourceIIOimport
dc.titleObservation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structures
dc.typeJournal article
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageH39
dc.source.endpageH41
dc.source.journalElectrochemical and Solid-State Letters
dc.source.issue2
dc.source.volume11
imec.availabilityPublished - open access


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