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Interface control of high k gate dielectrics on Ge

dc.contributor.authorCaymax, Matty
dc.contributor.authorHoussa, Michel
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorBellenger, Florence
dc.contributor.authorMartens, Koen
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-17T06:27:39Z
dc.date.available2021-10-17T06:27:39Z
dc.date.issued2008
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13487
dc.sourceIIOimport
dc.titleInterface control of high k gate dielectrics on Ge
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage6094
dc.source.endpage6099
dc.source.journalApplied Surface Science
dc.source.issue19
dc.source.volume254
dc.identifier.urlhttp://dx.doi.org/10.1016/j.apsusc.2008.02.134
imec.availabilityPublished - imec


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