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Accurate carrier profiling of n-type GaAs junctions

dc.contributor.authorClarysse, Trudo
dc.contributor.authorBrammertz, Guy
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorEyben, Pierre
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorClemente, Francesca
dc.contributor.authorMeuris, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSrnanek, Rudolf
dc.contributor.authorKinder, Rudolf
dc.contributor.authorSciana, B.
dc.contributor.authorRadziewicz, D.
dc.contributor.authorLi, Zhiqiang
dc.date.accessioned2021-10-17T06:34:46Z
dc.date.available2021-10-17T06:34:46Z
dc.date.issued2008
dc.identifier.issn1369-8001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13540
dc.sourceIIOimport
dc.titleAccurate carrier profiling of n-type GaAs junctions
dc.typeJournal article
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage259
dc.source.endpage266
dc.source.journalMaterials Science in Semiconductor Processing
dc.source.issue5_6
dc.source.volume11
imec.availabilityPublished - open access
imec.internalnotesE-MRS 2008 Spring Conference Symposium J: Beyond Silicon Technology: Materials and Devices for Post-Si CMOS


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