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Multi-gate devices for the 32nm technology node and beyond

dc.contributor.authorCollaert, Nadine
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorDixit, Abhisek
dc.contributor.authorFerain, Isabelle
dc.contributor.authorLai, Li-Shyue
dc.contributor.authorLenoble, Damien
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorNackaerts, Axel
dc.contributor.authorPawlak, Bartek
dc.contributor.authorRooyackers, Rita
dc.contributor.authorSchulz, Thomas
dc.contributor.authorSan, Kemal Tamer
dc.contributor.authorSon, Nak Jin
dc.contributor.authorVan Dal, Mark
dc.contributor.authorVerheyen, Peter
dc.contributor.authorvon Arnim, Klaus
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorBiesemans, Serge
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-17T06:35:32Z
dc.date.available2021-10-17T06:35:32Z
dc.date.issued2008
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13545
dc.sourceIIOimport
dc.titleMulti-gate devices for the 32nm technology node and beyond
dc.typeJournal article
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.source.peerreviewyes
dc.source.beginpage1291
dc.source.endpage1296
dc.source.journalSolid-State Electronics
dc.source.issue9
dc.source.volume52
imec.availabilityPublished - imec


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