dc.contributor.author | Cotrin Teixeira, Ricardo | |
dc.contributor.author | De Munck, Koen | |
dc.contributor.author | De Moor, Piet | |
dc.contributor.author | Baert, Kris | |
dc.contributor.author | Swinnen, Bart | |
dc.contributor.author | Van Hoof, Chris | |
dc.contributor.author | Knüttel, Alexander | |
dc.date.accessioned | 2021-10-17T06:38:16Z | |
dc.date.available | 2021-10-17T06:38:16Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 1807-1953 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13563 | |
dc.source | IIOimport | |
dc.title | Stress analysis on ultra thin ground wafers | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Munck, Koen | |
dc.contributor.imecauthor | De Moor, Piet | |
dc.contributor.imecauthor | Swinnen, Bart | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.source.peerreview | yes | |
dc.source.beginpage | 83 | |
dc.source.endpage | 89 | |
dc.source.journal | Journal of Integrated Circuits and Systems | |
dc.source.issue | 2 | |
dc.source.volume | 3 | |
dc.identifier.url | http://www.sbmicro.org.br/jics/ | |
imec.availability | Published - imec | |