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A low voltage, large displacement, large force inchworm actuator

dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-17T07:00:49Z
dc.date.available2021-10-17T07:00:49Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13696
dc.sourceIIOimport
dc.titleA low voltage, large displacement, large force inchworm actuator
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage1294
dc.source.endpage1301
dc.source.journalIEEE Journal of Microelectromechanical Systems
dc.source.issue6
dc.source.volume17
imec.availabilityPublished - imec


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