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Impact of the environmental conditions on the electrical characteristics of scanning spreading resistance microscopy

dc.contributor.authorEyben, Pierre
dc.contributor.authorMody, Jay
dc.contributor.authorVemula, Sri Charan
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T07:03:48Z
dc.date.available2021-10-17T07:03:48Z
dc.date.issued2008
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13711
dc.sourceIIOimport
dc.titleImpact of the environmental conditions on the electrical characteristics of scanning spreading resistance microscopy
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage338
dc.source.endpage341
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume26
imec.availabilityPublished - open access


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