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An analytical model to describe the efficiency of an immersion rinsing process

dc.contributor.authorFyen, Wim
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-17T07:10:15Z
dc.date.available2021-10-17T07:10:15Z
dc.date.issued2008-11
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13743
dc.sourceIIOimport
dc.titleAn analytical model to describe the efficiency of an immersion rinsing process
dc.typeJournal article
dc.contributor.imecauthorMertens, Paul
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage661
dc.source.endpage667
dc.source.journalIEEE Transactions on Semiconductor Manufacturing
dc.source.issue4
dc.source.volume21
imec.availabilityPublished - open access


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