IMEC enlarges nitride epiwafers
dc.contributor.author | Germain, Marianne | |
dc.date.accessioned | 2021-10-17T07:13:16Z | |
dc.date.available | 2021-10-17T07:13:16Z | |
dc.date.issued | 2008-12 | |
dc.identifier.issn | 1096-598X | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13758 | |
dc.source | IIOimport | |
dc.title | IMEC enlarges nitride epiwafers | |
dc.type | Journal article | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 23 | |
dc.source.endpage | 25 | |
dc.source.journal | Compound Semiconductor | |
imec.availability | Published - open access |