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Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films

dc.contributor.authorGiangrandi, Simone
dc.contributor.authorSajavaara, Timo
dc.contributor.authorBrijs, Bert
dc.contributor.authorArstila, Kai
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T07:14:51Z
dc.date.available2021-10-17T07:14:51Z
dc.date.issued2008
dc.identifier.issn0168-583X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13765
dc.sourceIIOimport
dc.titleLow-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films
dc.typeJournal article
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage5144
dc.source.endpage5150
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.issue24
dc.source.volume266
imec.availabilityPublished - open access


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