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Performance and reliability of HfALOx-based interpoly dielectrics for floating-gate flash memory

dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorWellekens, Dirk
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorBrunco, David
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorRuiz Aguado, Daniel
dc.contributor.authorBlomme, Pieter
dc.contributor.authorvan der Zanden, Koen
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-17T07:23:30Z
dc.date.available2021-10-17T07:23:30Z
dc.date.issued2008
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13803
dc.sourceIIOimport
dc.titlePerformance and reliability of HfALOx-based interpoly dielectrics for floating-gate flash memory
dc.typeJournal article
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorWellekens, Dirk
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage557
dc.source.endpage563
dc.source.journalSolid-State Electronics
dc.source.issue4
dc.source.volume52
imec.availabilityPublished - open access


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