dc.contributor.author | Kimura, Kenji | |
dc.contributor.author | Nakajima, Kaoru | |
dc.contributor.author | Zhao, Ming | |
dc.contributor.author | Nohira, Hiroshi | |
dc.contributor.author | Hattori, Takeo | |
dc.contributor.author | Kobata, Masaaki | |
dc.contributor.author | Ikenaga, Eiji | |
dc.contributor.author | Kim, Jung Jin | |
dc.contributor.author | Kobayashi, Keisuku | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T08:00:30Z | |
dc.date.available | 2021-10-17T08:00:30Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0142-2421 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13953 | |
dc.source | IIOimport | |
dc.title | Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states | |
dc.type | Journal article | |
dc.contributor.imecauthor | Zhao, Ming | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 423 | |
dc.source.endpage | 426 | |
dc.source.journal | Surface and Interface Analysis | |
dc.source.issue | 3_4 | |
dc.source.volume | 40 | |
imec.availability | Published - imec | |