Show simple item record

Influence of absorbed water components on SiOCH low-k reliability

dc.contributor.authorLi, Yunlong
dc.contributor.authorCiofi, Ivan
dc.contributor.authorCarbonell, Laure
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaex, Karen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-17T08:21:25Z
dc.date.available2021-10-17T08:21:25Z
dc.date.issued2008-08
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14029
dc.sourceIIOimport
dc.titleInfluence of absorbed water components on SiOCH low-k reliability
dc.typeJournal article
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage34113
dc.source.journalJournal of Applied Physics
dc.source.issue3
dc.source.volume104
dc.identifier.urlhttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000104000003034113000001&idtype=cvips&gifs=yes
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
16592.pdf
Size:
676.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record