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Investigation on molybdenum and its conductive oxides as p-type metal gate candidates

dc.contributor.authorLi, Zilan
dc.contributor.authorSchram, Tom
dc.contributor.authorWitters, Thomas
dc.contributor.authorCho, Hag-Ju
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorYamada, Naoki
dc.contributor.authorTsunoda, Takaaki
dc.contributor.authorHooker, Jacob
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-17T08:22:58Z
dc.date.available2021-10-17T08:22:58Z
dc.date.issued2008
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14034
dc.sourceIIOimport
dc.titleInvestigation on molybdenum and its conductive oxides as p-type metal gate candidates
dc.typeJournal article
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpageH481
dc.source.journalJournal of the Electrochemical Society
dc.source.issue7
dc.source.volume155
imec.availabilityPublished - imec


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