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Multi-plate misalignment artifacts in rotating-compensator ellipsometry: analysis and data treatment

dc.contributor.authorMarsik, Premysl
dc.contributor.authorHumlicek, Josef
dc.date.accessioned2021-10-17T08:49:30Z
dc.date.available2021-10-17T08:49:30Z
dc.date.issued2008
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14125
dc.sourceIIOimport
dc.titleMulti-plate misalignment artifacts in rotating-compensator ellipsometry: analysis and data treatment
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage1064
dc.source.endpage1067
dc.source.journalPhysica Status Solidi C
dc.source.issue5
dc.source.volume5
imec.availabilityPublished - imec


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