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Characterization of boron doped diamond epilayers grown in a NIRIM type reactor

dc.contributor.authorMortet, Vincent
dc.contributor.authorDaenen, M.
dc.contributor.authorTeraji, T.
dc.contributor.authorLazea, Ileana Andrada
dc.contributor.authorVorlicek, V.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHaenen, Ken
dc.contributor.authorD'Olieslaeger, Marc
dc.date.accessioned2021-10-17T09:09:47Z
dc.date.available2021-10-17T09:09:47Z
dc.date.issued2008
dc.identifier.issn0925-9635
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14190
dc.sourceIIOimport
dc.titleCharacterization of boron doped diamond epilayers grown in a NIRIM type reactor
dc.typeJournal article
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewyes
dc.source.beginpage1330
dc.source.endpage1334
dc.source.journalDiamond and Related Materials
dc.source.issue7_10
dc.source.volume17
imec.availabilityPublished - imec


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