Show simple item record

Air-gap formation by UV-assisted decomposition of CVD material

dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorHumbert, Aurelie
dc.contributor.authorVan Besien, Els
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorTravaly, Youssef
dc.contributor.authorRichard, Olivier
dc.contributor.authorWillegems, Myriam
dc.contributor.authorVolders, Henny
dc.contributor.authorKellens, Kristof
dc.contributor.authorDaamen, Roel
dc.contributor.authorHoofman, Romano
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-17T09:35:21Z
dc.date.available2021-10-17T09:35:21Z
dc.date.issued2008
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14267
dc.sourceIIOimport
dc.titleAir-gap formation by UV-assisted decomposition of CVD material
dc.typeJournal article
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorHumbert, Aurelie
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorHoofman, Romano
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecHumbert, Aurelie::0000-0002-2538-8991
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecHoofman, Romano::0000-0001-8740-104X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2071
dc.source.endpage2074
dc.source.journalMicroelectronic Engineering
dc.source.issue10
dc.source.volume85
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
16164.pdf
Size:
686.5Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record